Optical specifications光學(xué)規(guī)格

Standard標(biāo)準(zhǔn)規(guī)格

Scan width掃描寬度

300 mm

170 mm

Wavelength波長(zhǎng)(nm)

355-375

515-532

1030-1070

Minimum Spot*小光斑尺寸(FWHM)1

9 μm

13 μm

26 μm

Minimum Spot*小光斑尺寸(1/e2 dia)

15 μm

22 μm

44 μm

Input beam diameter(1/e2 dia)

輸入光斑直徑(1/e2 dia)

11 mm

6 mm

Input clear aperture輸入數(shù)值孔徑

19 mm

10 mm

Position Accuracy定位精度

± 10 μm or ±1 μm 2

Line straightness線平直度

15 μm or 1 μm 2

Spot repeatability光斑重復(fù)性

< 3 μm 3

System specifications系統(tǒng)規(guī)格

Input beam輸入光斑

Parallel beam

Scan speed掃描速度

56 – 224 lines per second

100 – 400 lines per second

Moving spot speed光斑移動(dòng)速度

25 – 100 meters per second

Scanner mechanical efficiency

掃描頭機(jī)械效率效率

71 %

Optical efficiency光學(xué)效率

> 85 % GR/IR

Average Laser power 1平均激光功率

140 W (>7 ps) 50W (200 fs)

Minimum pulse width*小脈沖寬度

> 200 fs

Maximum pulse energy*小脈沖能量

150 μJ (ps) 50 μJ (fs)

Mechanical interface機(jī)械接口

Industry standard interface

Scanner to substrate clearance

掃描頭到基板距離

26.5 mm

18 mm

Power consumption功率

125 W max.

Electrical supply電源

Mono + earth 50/60 Hz， 100-240 VAC

PC Connection電腦鏈接

Ethernet TCP/IP protocol and USB3

Cable Length連線長(zhǎng)度

Max. 5 meter between scanner unit and control electronics